Charge storage in silicon-implanted silicondioxide layers examined by scanning probe microscopy

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Details

Original languageEnglish
Pages (from-to)159-165
Number of pages7
JournalThin Solid Films
Volume513
Issue number1-2
Publication statusPublished - Aug 2006
Peer-reviewedYes

External IDs

Scopus 33745269772

Keywords