Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer.
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Details
Original language | English |
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Title of host publication | Proceedings of SPIE |
Volume | 9517 |
Publication status | Published - 2015 |
Peer-reviewed | Yes |
External IDs
ORCID | /0000-0003-0554-2178/work/148606936 |
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