BEoL Varactors Based on HfO2/ZrO2Superlattice for mmWave Applications

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Sukhrob Abdulazhanov - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Quang Huy Le - , Fraunhofer Institute for Photonic Microsystems (Author)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ayse Sunbul - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kampfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Gerald Gerlach - , Professor (rtd.) of Solid-State Electronics, Chair of Solid State Electronics (Author)

Abstract

In this study, we demonstrate for the first time the mmWave performance of a thin-film metal-ferroelectric-metal (MFM) varactor utilizing (HfO2/ZrO2)4 superlattice (SL), integrated into the Back-End-of-Line (BEoL) of 180 nm HV SOI technology. At low frequencies, the varactor exhibits tunability of 28.9% and 24% before and after wake-up cycling, respectively, using voltage sweeps ranging from -2.4 V to 1 V. During mmWave characterization spanning from 1 GHz to 60 GHz, the device demonstrates consistent tunability of 19.6%-18.8% and 17% - 15.7% before and after wake-up, respectively. Moreover, comparison with a standard Hf0.5 Z r0.5O2 (HZO) varactor, integrated within a similar technology, reveals the superior performance of superlattice-based varactor, highlighting its immense potential for mmWave applications.

Details

Original languageEnglish
Title of host publicationESSERC 2024 - Proceedings
PublisherIEEE Computer Society
Pages245-248
Number of pages4
ISBN (electronic)9798350388138
Publication statusPublished - 2024
Peer-reviewedYes

Publication series

SeriesEuropean Conference on Solid-State Circuits (ESSCIRC)

Conference

Title50th IEEE European Solid-State Electronics Research Conference
SubtitleThe Next Circuits for a Better Life
Abbreviated titleESSERC 2024
Conference number50
Duration9 - 12 September 2024
Website
LocationBruges Meeting & Convention Centre (BMCC)
CityBruges
CountryBelgium

External IDs

ORCID /0000-0002-7062-9598/work/174430525

Keywords

Keywords

  • Back-End-of-Line, ferroelectric, loss tangent, MFM varactor, Q-factor, superlattice, tunability