BEoL Varactors Based on HfO2/ZrO2Superlattice for mmWave Applications
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
In this study, we demonstrate for the first time the mmWave performance of a thin-film metal-ferroelectric-metal (MFM) varactor utilizing (HfO2/ZrO2)4 superlattice (SL), integrated into the Back-End-of-Line (BEoL) of 180 nm HV SOI technology. At low frequencies, the varactor exhibits tunability of 28.9% and 24% before and after wake-up cycling, respectively, using voltage sweeps ranging from -2.4 V to 1 V. During mmWave characterization spanning from 1 GHz to 60 GHz, the device demonstrates consistent tunability of 19.6%-18.8% and 17% - 15.7% before and after wake-up, respectively. Moreover, comparison with a standard Hf0.5 Z r0.5O2 (HZO) varactor, integrated within a similar technology, reveals the superior performance of superlattice-based varactor, highlighting its immense potential for mmWave applications.
Details
| Original language | English |
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| Title of host publication | ESSERC 2024 - Proceedings |
| Publisher | IEEE Computer Society |
| Pages | 245-248 |
| Number of pages | 4 |
| ISBN (electronic) | 9798350388138 |
| Publication status | Published - 2024 |
| Peer-reviewed | Yes |
Publication series
| Series | European Conference on Solid-State Circuits (ESSCIRC) |
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Conference
| Title | 50th IEEE European Solid-State Electronics Research Conference |
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| Subtitle | The Next Circuits for a Better Life |
| Abbreviated title | ESSERC 2024 |
| Conference number | 50 |
| Duration | 9 - 12 September 2024 |
| Website | |
| Location | Bruges Meeting & Convention Centre (BMCC) |
| City | Bruges |
| Country | Belgium |
External IDs
| ORCID | /0000-0002-7062-9598/work/174430525 |
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Keywords
ASJC Scopus subject areas
Keywords
- Back-End-of-Line, ferroelectric, loss tangent, MFM varactor, Q-factor, superlattice, tunability