BEoL Varactors Based on HfO2/ZrO2Superlattice for mmWave Applications
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
In this study, we demonstrate for the first time the mmWave performance of a thin-film metal-ferroelectric-metal (MFM) varactor utilizing (HfO2/ZrO2)4 superlattice (SL), integrated into the Back-End-of-Line (BEoL) of 180 nm HV SOI technology. At low frequencies, the varactor exhibits tunability of 28.9% and 24% before and after wake-up cycling, respectively, using voltage sweeps ranging from -2.4 V to 1 V. During mmWave characterization spanning from 1 GHz to 60 GHz, the device demonstrates consistent tunability of 19.6%-18.8% and 17% - 15.7% before and after wake-up, respectively. Moreover, comparison with a standard Hf0.5 Z r0.5O2 (HZO) varactor, integrated within a similar technology, reveals the superior performance of superlattice-based varactor, highlighting its immense potential for mmWave applications.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | ESSERC 2024 - Proceedings |
| Herausgeber (Verlag) | IEEE Computer Society |
| Seiten | 245-248 |
| Seitenumfang | 4 |
| ISBN (elektronisch) | 9798350388138 |
| Publikationsstatus | Veröffentlicht - 2024 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | European Conference on Solid-State Circuits (ESSCIRC) |
|---|
Konferenz
| Titel | 50th IEEE European Solid-State Electronics Research Conference |
|---|---|
| Untertitel | The Next Circuits for a Better Life |
| Kurztitel | ESSERC 2024 |
| Veranstaltungsnummer | 50 |
| Dauer | 9 - 12 September 2024 |
| Webseite | |
| Ort | Bruges Meeting & Convention Centre (BMCC) |
| Stadt | Bruges |
| Land | Belgien |
Externe IDs
| ORCID | /0000-0002-7062-9598/work/174430525 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Back-End-of-Line, ferroelectric, loss tangent, MFM varactor, Q-factor, superlattice, tunability