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Automatic Fault Detection in Rails of Overhead Transport Systems for Semiconductor Fabs

Research output: Contribution to conferences › Paper › Contributed › peer-review

Contributors

Artem Zhakov - , Chair of Material Handling (Author)
Hailong Zhu - , Chair of Material Handling (Author)
Armin Siegel - , Chair of Material Handling (Author)
Sebastian Rank - , Chair of Material Handling (Author)
Thorsten Schmidt - , Chair of Material Handling (Author)
Lars Fienhold - (Author)
Stephan Hummel - (Author)

Details

Original language	English
Pages	1-6
Number of pages	6
Publication status	Published - 2019
Peer-reviewed	Yes

External IDs

Scopus	85071051290
ORCID	/0000-0002-1484-7187/work/142243088

Keywords

Keywords

Rails OHT, Artificial neural networks, Sensors Fault detection, Network topology, Neurons Training fault detection, AMHS