Automated Growth of SiGe Single Crystals with Constant Axial Gradient by Czochralski Technique

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • N.V. Abrosimov - , Leibniz Institute for Crystal Growth (First author)
  • Vladimir N. Kurlov - , Russian Academy of Sciences (Author)
  • Robert Schewski - , Leibniz Institute for Crystal Growth (Author)
  • Jan-Christoph Winkler - , Chair of Control Theory (Author)

Details

Original languageGerman
Article number1900097
JournalCrystal research and technology: journal of experimental and industrial crystallography
Volume55
Issue number2
Publication statusPublished - 2019
Peer-reviewedYes

External IDs

Scopus 85075196534

Keywords

Research priority areas of TU Dresden

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ASJC Scopus subject areas