Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review



Lot-to-order matching (LTOM) is considered a critical step in the manufacturing process as an inefficient allocation has substantial adverse impacts on fab performance. Several optimization approaches have been developed in research, but successful use cases and best practices are scarce, particularly for 300 mm semiconductor facilities. Our contribution addresses this insufficiency and presents the approach and results of an automation and optimization project for the LTOM process of 300 mm production lines at Infineon Technologies Dresden and Austria. Within our approach, we first analyzed and standardized the former manual as-is process using the Business Process Model and Notation approach to enable it for automation before we focused on further targeted optimization of the process and the developed IT artifact. The results led to considerable positive effects on essential qualitative and quantitative KPIs, such as delivery reliability, throughput, customer satisfaction, and workload reduction. Furthermore, we describe challenges that occurred during the project and present applied measures.


Original languageEnglish
Title of host publication2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
PublisherWiley-IEEE Press
ISBN (electronic)9781728186467
Publication statusPublished - May 2021

External IDs

ORCID /0000-0002-3197-6159/work/142235845
ORCID /0000-0002-3549-080X/work/142245948
ORCID /0000-0001-6942-3763/work/142252879



  • Lot-to-order matching, case study, factory automation, semiconductor manufacturing