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Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

Activity: Talk or presentation at external institutions/eventsTalk/PresentationContributed

Persons and affiliations

Date

12 May 2021

Conference

Title32nd Annual SEMI Advanced Semiconductor Manufacturing Conference
Abbreviated titleASMC 2021
Conference number
Duration10 - 12 May 2021
Degree of recognitionInternational event
LocationSaratoga Springs
City
CountryUnited States

Keywords

Research priority areas of TU Dresden

    DFG Classification of Subject Areas according to Review Boards

      Subject groups, research areas, subject areas according to Destatis

        Sustainable Development Goals

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