Analysis of photoelastic properties of monocrystalline silicon
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon has a diamond lattice structure, the stress-dependent change in the refractive indices varies with the loading direction. In this work, an anisotropic stress-optic law is derived, and the corresponding stress-optical parameters are measured using a Brazilian disc test. The parameters were determined to be (π11-π12) = 14.4 . 10-7MPa-1and π44 = 9.4 . 10-7MPa-1. The results of this work are compared to previous works found in the literature, and the deviations are discussed.
Details
Original language | English |
---|---|
Pages (from-to) | 209-217 |
Number of pages | 9 |
Journal | Journal of sensors and sensor systems |
Volume | 9 |
Issue number | 2 |
Publication status | Published - 16 Jul 2020 |
Peer-reviewed | Yes |