Analysis of photoelastic properties of monocrystalline silicon

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Markus Stoehr - , Leipzig University of Applied Sciences (Author)
  • Gerald Gerlach - , Chair of Solid State Electronics, TUD Dresden University of Technology (Author)
  • Thomas Härtling - , TUD Dresden University of Technology (Author)
  • Stephan Schoenfelder - , Leipzig University of Applied Sciences (Author)

Abstract

Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon has a diamond lattice structure, the stress-dependent change in the refractive indices varies with the loading direction. In this work, an anisotropic stress-optic law is derived, and the corresponding stress-optical parameters are measured using a Brazilian disc test. The parameters were determined to be (π11-π12) = 14.4 . 10-7MPa-1and π44 = 9.4 . 10-7MPa-1. The results of this work are compared to previous works found in the literature, and the deviations are discussed.

Details

Original languageEnglish
Pages (from-to)209-217
Number of pages9
JournalJournal of sensors and sensor systems
Volume9
Issue number2
Publication statusPublished - 16 Jul 2020
Peer-reviewedYes

Keywords