Analysis of photoelastic properties of monocrystalline silicon

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Markus Stoehr - , Hochschule für Technik, Wirtschaft und Kultur Leipzig (HTWK) (Autor:in)
  • Gerald Gerlach - , Professur für Festkörperelektronik, Technische Universität Dresden (Autor:in)
  • Thomas Härtling - , Technische Universität Dresden (Autor:in)
  • Stephan Schoenfelder - , Hochschule für Technik, Wirtschaft und Kultur Leipzig (HTWK) (Autor:in)

Abstract

Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon has a diamond lattice structure, the stress-dependent change in the refractive indices varies with the loading direction. In this work, an anisotropic stress-optic law is derived, and the corresponding stress-optical parameters are measured using a Brazilian disc test. The parameters were determined to be (π11-π12) = 14.4 . 10-7MPa-1and π44 = 9.4 . 10-7MPa-1. The results of this work are compared to previous works found in the literature, and the deviations are discussed.

Details

OriginalspracheEnglisch
Seiten (von - bis)209-217
Seitenumfang9
FachzeitschriftJournal of sensors and sensor systems
Jahrgang9
Ausgabenummer2
PublikationsstatusVeröffentlicht - 16 Juli 2020
Peer-Review-StatusJa

Schlagworte