Analyse der Maßstabilität des 36 nm-Double-Patterning-Prozesses

Research output: Types of Thesis › Diploma thesis

Contributors

Details

Original languageGerman
Awarding Institution
Supervisors/Advisors
  • Spallek, Rainer, Supervisor
  • Preußer, Thomas, Supervisor
Publication statusPublished - 2009
No renderer: customAssociatesEventsRenderPortal,dk.atira.pure.api.shared.model.researchoutput.Thesis

External IDs

ORCID /0000-0001-9692-2808/work/142659160

Keywords

Keywords

  • Patterning-Prozess