Algorithmic Approaches for System-Level Simulation of MEMS and Aspects of Cosimulation

Research output: Contribution to book/Conference proceedings/Anthology/Report › Chapter in book/Anthology/Report › Invited › peer-review

Contributors

  • Peter Schneider - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)
  • Christoph Clauß - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)
  • Ulrich Donath - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)
  • Günter Elst - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)
  • Olaf Enge-Rosenblatt - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)
  • Thomas Uhle - , Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division (Author)

Details

Original languageEnglish
Title of host publicationSystem-Level Modeling of MEMS
EditorsTamara Bechtold, Gabriele Schrag, Lihong Feng
PublisherWiley-VCH Verlag GmbH & Co. KGaA
Chapter4
Pages95-121
Number of pages27
ISBN (electronic)978-3-527-64713-2
ISBN (print)978-3-527-31903-9
Publication statusPublished - 2013
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesAdvanced micro & nanosystems
Volume10
ISSN1865-3715

External IDs

Scopus 85018878147