Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

The hafnium oxide (HfO2) material system offers a unique combination of outstanding physical properties, that enable a manifold of novel integrated ferroelectric, piezoelectric, and pyroelectric applications. Long-term stability is an essential concern for nonvolatile memory devices, sensors, and nanoelectromechanical systems. Herein, the aging effects of the pyroelectric response in polycrystalline Si-doped HfO2 thin films in the field-free case are reported. It is observed that aging effects are accelerated by high temperatures, lower film thicknesses, and higher dopant concentration. The decay of the pyroelectric coefficients and the dielectric permittivity exhibits a logarithmic time dependence. The full pyroelectric response is restored by repeated electric field cycling (i.e., deaging). After the aging process, a significant internal bias field is observed. It is concluded that the migration of positively charged oxygen vacancies in the films is responsible for this aging process.

Details

Original languageEnglish
Article number2100023
JournalPhysica Status Solidi - Rapid Research Letters
Volume15
Issue number5
Publication statusPublished - May 2021
Peer-reviewedYes

External IDs

ORCID /0000-0002-2484-4158/work/142257581

Keywords

Keywords

  • aging atomic layer deposition, hafnium oxide, pyroelectric effects