Adaptive APC strategies for a PVD process: a case study.

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publicationProceedings of the 12th Advanced Process Control and Manufacturing Conference (APCM 2012)
Place of PublicationGrenoble, France
Pages29-34
Number of pages6
Publication statusPublished - 1 Apr 2012
Peer-reviewedYes

External IDs

ORCID /0000-0002-6824-3549/work/142236895