A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.
Details
Original language | English |
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Title of host publication | 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Publisher | IEEE |
Pages | 473-477 |
Number of pages | 5 |
ISBN (print) | 978-1-5090-1948-9 |
Publication status | Published - 20 Apr 2016 |
Peer-reviewed | Yes |
Externally published | Yes |
Conference
Title | 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
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Duration | 17 - 20 April 2016 |
Location | Sendai, Japan |
External IDs
Scopus | 85007178950 |
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ORCID | /0000-0002-8929-2526/work/150883852 |
Keywords
Keywords
- Resonant frequency, Couplings, Velocity measurement, Ultrasonic variables measurement, Lithium niobate, Bandwidth