A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Najoua Assila - , Tohoku University (Author)
  • Michio Kadota - , Tohoku University (Author)
  • Yuji Ohashi - , Tohoku University (Author)
  • Shuji Tanaka - , Tohoku University (Author)

Abstract

The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.

Details

Original languageEnglish
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE
Pages473-477
Number of pages5
ISBN (print)978-1-5090-1948-9
Publication statusPublished - 20 Apr 2016
Peer-reviewedYes
Externally publishedYes

Conference

Title2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Duration17 - 20 April 2016
LocationSendai, Japan

External IDs

Scopus 85007178950
ORCID /0000-0002-8929-2526/work/150883852

Keywords

Keywords

  • Resonant frequency, Couplings, Velocity measurement, Ultrasonic variables measurement, Lithium niobate, Bandwidth