A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Najoua Assila - , Tohoku University (Autor:in)
  • Michio Kadota - , Tohoku University (Autor:in)
  • Yuji Ohashi - , Tohoku University (Autor:in)
  • Shuji Tanaka - , Tohoku University (Autor:in)

Abstract

The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.

Details

OriginalspracheEnglisch
Titel2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Herausgeber (Verlag)IEEE
Seiten473-477
Seitenumfang5
ISBN (Print)978-1-5090-1948-9
PublikationsstatusVeröffentlicht - 20 Apr. 2016
Peer-Review-StatusJa
Extern publiziertJa

Konferenz

Titel2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Dauer17 - 20 April 2016
OrtSendai, Japan

Externe IDs

Scopus 85007178950
ORCID /0000-0002-8929-2526/work/150883852

Schlagworte

Schlagwörter

  • Resonant frequency, Couplings, Velocity measurement, Ultrasonic variables measurement, Lithium niobate, Bandwidth