A Semi-Empirical Model of Cathodic Arc Spot Motion under the Influence of External Magnetic Fields

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Achim Mahrle - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Otmar Zimmer - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Steffen Schenk - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Madlen Borkmann - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Christoph Leyens - , Chair of Materials Technology, Fraunhofer Institute for Material and Beam Technology (Author)

Abstract

Plasma generation by cathodic arc spots plays a crucial role for coating processes that make use of the Arc-PVD technology. Usually, the arc spot motion over the cathode is steered by a magnetic field of a particular distribution and magnitude to ensure a continuous plasma generation, the avoidance of liquid droplets, and a proper utilization of cathode material by homogeneous erosion. This study presents a semi-empirical model that allows for an examination and characterization of the arc spot motion with regard to direction and speed as a function of an imposed magnetic field. This model considers the different components of random walk, retrograde, and Robson drift motion. Introduced empirical coefficients were determined by corresponding experimental investigations. The calibrated model describes the arc spot motion in good agreement to the recorded spot tracks and can therefore be applied for an evaluation of different magnetic field configurations.

Details

Original languageEnglish
Pages (from-to)1-15
Number of pages15
JournalPlasma
Volume7 (2024)
Issue number1
Publication statusPublished - 19 Dec 2023
Peer-reviewedYes

Keywords

Keywords

  • cathodic arc spot, modeling, physical vapor deposition, random walk, retrograde motion, Robson drift, simulation, vacuum arc deposition