A Semi-Empirical Model of Cathodic Arc Spot Motion under the Influence of External Magnetic Fields

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Achim Mahrle - , Fraunhofer-Institut für Werkstoff- und Strahltechnik (Autor:in)
  • Otmar Zimmer - , Fraunhofer-Institut für Werkstoff- und Strahltechnik (Autor:in)
  • Steffen Schenk - , Fraunhofer-Institut für Werkstoff- und Strahltechnik (Autor:in)
  • Madlen Borkmann - , Fraunhofer-Institut für Werkstoff- und Strahltechnik (Autor:in)
  • Christoph Leyens - , Professur für Werkstofftechnik, Fraunhofer-Institut für Werkstoff- und Strahltechnik (Autor:in)

Abstract

Plasma generation by cathodic arc spots plays a crucial role for coating processes that make use of the Arc-PVD technology. Usually, the arc spot motion over the cathode is steered by a magnetic field of a particular distribution and magnitude to ensure a continuous plasma generation, the avoidance of liquid droplets, and a proper utilization of cathode material by homogeneous erosion. This study presents a semi-empirical model that allows for an examination and characterization of the arc spot motion with regard to direction and speed as a function of an imposed magnetic field. This model considers the different components of random walk, retrograde, and Robson drift motion. Introduced empirical coefficients were determined by corresponding experimental investigations. The calibrated model describes the arc spot motion in good agreement to the recorded spot tracks and can therefore be applied for an evaluation of different magnetic field configurations.

Details

OriginalspracheEnglisch
Seiten (von - bis)1-15
Seitenumfang15
FachzeitschriftPlasma
Jahrgang7 (2024)
Ausgabenummer1
PublikationsstatusVeröffentlicht - 19 Dez. 2023
Peer-Review-StatusJa

Schlagworte

Schlagwörter

  • cathodic arc spot, modeling, physical vapor deposition, random walk, retrograde motion, Robson drift, simulation, vacuum arc deposition