A new twin flash™ Cell for 2 and 4 bit operation at 63nm feature size

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • N. Nagel - , Qimonda Dresden GmbH and Co. OHG (Author)
  • T. Müller - , Qimonda Dresden GmbH and Co. OHG (Author)
  • M. Isler - , Qimonda Dresden GmbH and Co. OHG (Author)
  • V. Pissors - , Qimonda Dresden GmbH and Co. OHG (Author)
  • J. U. Sachse - , Qimonda Dresden GmbH and Co. OHG (Author)
  • D. Manger - , Qimonda Dresden GmbH and Co. OHG (Author)
  • D. Caspary - , Qimonda Dresden GmbH and Co. OHG (Author)
  • S. Parascandola - , Qimonda Dresden GmbH and Co. OHG (Author)
  • D. Olligs - , Qimonda Dresden GmbH and Co. OHG (Author)
  • H. Boubekeur - , Qimonda Dresden GmbH and Co. OHG (Author)
  • F. Heinrichsdorff - , Qimonda Dresden GmbH and Co. OHG (Author)
  • L. Bach - , Qimonda Dresden GmbH and Co. OHG (Author)
  • V. Polei - , Qimonda Dresden GmbH and Co. OHG (Author)
  • J. Gupta - , Qimonda Dresden GmbH and Co. OHG (Author)
  • D. Pritchard - , Qimonda Dresden GmbH and Co. OHG (Author)
  • S. Riedel - , Qimonda Dresden GmbH and Co. OHG (Author)
  • M. Strassburg - , Qimonda Dresden GmbH and Co. OHG (Author)
  • J. Deppe - , Qimonda Dresden GmbH and Co. OHG (Author)
  • U. Bewersdorff-Sarlette - , Qimonda Dresden GmbH and Co. OHG (Author)
  • M. Verhoeven - , Qimonda Dresden GmbH and Co. OHG (Author)
  • L. Lattard - , Qimonda Dresden GmbH and Co. OHG (Author)
  • M. Markert - , Qimonda Dresden GmbH and Co. OHG (Author)
  • E. Ruttkowski - , Qimonda Dresden GmbH and Co. OHG (Author)
  • R. Mikalo - , Qimonda Dresden GmbH and Co. OHG (Author)
  • J. Willer - , Qimonda Dresden GmbH and Co. OHG (Author)
  • N. Schulze - , Qimonda Dresden GmbH and Co. OHG (Author)
  • C. Ludwig - , Qimonda Dresden GmbH and Co. OHG (Author)
  • E. G. Stein - , Qimonda Dresden GmbH and Co. OHG (Author)
  • T. Mikolajick - , Qimonda Dresden GmbH and Co. OHG (Author)
  • K. H. Küsters - , Qimonda Dresden GmbH and Co. OHG (Author)
  • A. Shappir - , Saifun Semiconductors Ltd. (Author)
  • Y. Shur - , Saifun Semiconductors Ltd. (Author)
  • E. Lusky - , Saifun Semiconductors Ltd. (Author)
  • B. Eitan - , Saifun Semiconductors Ltd. (Author)

Abstract

A 63nm Twin Flash memory cell with a size of 0.0225μm2 / 2 (4) bits is presented. The cell is proposed for data Flash products with 4 to 16Gbit densities. To achieve small cell areas, a buried bit line and an aggressive gate length of ∼100nm are the key features of this 63nm Twin Flash cell. The cell is well capable of 2 and 4 bit operation.

Details

Original languageEnglish
Title of host publication2007 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA - Proceedings of Technical Papers
Publication statusPublished - 2007
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesInternational Symposium on VLSI Technology, Systems, and Applications
ISSN1524-766X

Conference

Title2007 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA
Duration23 - 25 April 2007
CityHsinchu
CountryTaiwan, Province of China

External IDs

ORCID /0000-0003-3814-0378/work/156338391