A new approach for feedback control of radius and growth rate in Czochralski (Cz) processes exemplarily studied on LEC-InP

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publicationConference Proceedings - International Conference on Indium Phosphide and Related Materials
Volume1
Publication statusPublished - 2006
Peer-reviewedYes

External IDs

Scopus 33847163560

Keywords

Research priority areas of TU Dresden

DFG Classification of Subject Areas according to Review Boards

Subject groups, research areas, subject areas according to Destatis