A framework for optimization of crystal growth processes applied to VGF growth of fluorides

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

We develop a flexible framework for optimization of crystal growth processes. This framework is based on an accurate and robust process model and combines two optimization loops. Adapting of model parameters and optimizing of process parameters

Details

Original languageEnglish
Pages (from-to)e349-e353
JournalJournal of crystal growth
Volume275
Issue number1-2
Publication statusPublished - 2005
Peer-reviewedYes

External IDs

WOS 000208324600054
Scopus 15944403149

Keywords