A framework for optimization of crystal growth processes applied to VGF growth of fluorides
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
We develop a flexible framework for optimization of crystal growth processes. This framework is based on an accurate and robust process model and combines two optimization loops. Adapting of model parameters and optimizing of process parameters
Details
Original language | English |
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Pages (from-to) | e349-e353 |
Journal | Journal of crystal growth |
Volume | 275 |
Issue number | 1-2 |
Publication status | Published - 2005 |
Peer-reviewed | Yes |
External IDs
WOS | 000208324600054 |
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Scopus | 15944403149 |