Reducing the tunneling barrier thickness of bilayer ferroelectric tunnel junctions with metallic electrodes

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Suzanne Lancaster - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Mattia Segatto - , University of Udine (Autor:in)
  • Claudia Silva - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Benjamin Max - , Professur für Nanoelektronik, Arbeitsgruppe Cool Silicon (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • David Esseni - , University of Udine (Autor:in)
  • Francesco Driussi - , University of Udine (Autor:in)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

Ferroelectric tunnel junctions (FTJs) are non-volatile devices in which the read current is controlled by the polarisation state of a ferroelectric (FE) layer [1]. Bilayer FTJs based on hafnium zirconium oxide (HZO) and a dielectric layer (DE, here Al2O3) on metallic electrodes show promise for embdedded Non-Volatile Memory and BEOL integration [2], [3]. However, the DE thickness impacts both the FTJ properties [4] and stability of the FE state [5]. Previous research indicated an optimal DE thickness of 2-3 nm [4], but this leads to a deleterious rapid polarisation loss [6]. Here, electrode work function (WF) engineering is presented as a suitable measure to reduce the tunneling barrier height, thus improving the current density of bilayer FTJs [7]. DE scaling is also proposed to retain high TER and J{on}-J{off} at reduced operating voltages.

Details

OriginalspracheEnglisch
Titel2023 Device Research Conference, DRC 2023
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers Inc.
ISBN (elektronisch)9798350323108
PublikationsstatusVeröffentlicht - 2023
Peer-Review-StatusJa

Publikationsreihe

ReiheDevice Research Conference - Conference Digest, DRC
Band2023-June
ISSN1548-3770

Konferenz

Titel2023 Device Research Conference, DRC 2023
Dauer25 - 28 Juni 2023
StadtSanta Barbara
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/144255457

Schlagworte

ASJC Scopus Sachgebiete