Real-time closed-loop control for micro mirrors with quasistatic comb drives

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

This paper presents the application of a real-time closed-loop control for the quasistatic axis of electrostatic micro scanning mirrors. In comparison to resonantly driven mirrors, the quasistatic comb drive allows arbitrary motion profiles with frequencies up to its eigenfrequency. A current mirror setup at Fraunhofer IPMS is manufactured with a staggered vertical comb (SVC) drive and equipped with an integrated piezo-resistive deflection sensor, which can potentially be used as position feedback sensor. The control design is accomplished based on a nonlinear mechatronic system model and the preliminary parameter characterization. In previous papers [1, 2] we have shown that jerk-limited trajectories, calculated offline, provide a suitable method for parametric trajectory design, taking into account physical limitations given by the electrostatic comb and thus decreasing the dynamic requirements. The open-loop control shows in general unfavorable residual eigenfrequency oscillations leading to considerable tracking errors for desired triangle trajectories [3]. With real-time closed-loop control, implemented on a dSPACE system using an optical feedback, we can significantly reduce these errors and stabilize the mirror motion against external disturbances. In this paper we compare linear and different nonlinear closed-loop control strategies as well as two observer variants for state estimation. Finally, we evaluate the simulation and experimental results in terms of steady state accuracy and the concept feasibility for a low-cost realization.

Details

OriginalspracheEnglisch
TitelMOEMS and Miniaturized Systems XV
Redakteure/-innenWibool Piyawattanametha, Yong-Hwa Park
Herausgeber (Verlag)SPIE - The international society for optics and photonics, Bellingham
Seitenumfang13
ISBN (elektronisch)9781628419955
PublikationsstatusVeröffentlicht - 2016
Peer-Review-StatusJa

Publikationsreihe

ReiheProceedings of SPIE - The International Society for Optical Engineering
Band9760
ISSN0277-786X

Konferenz

TitelConference on MOEMS and Miniaturized Systems XV
Dauer15 - 17 Februar 2016
StadtSan Francisco
LandKanada

Externe IDs

Scopus 84987657191
ORCID /0000-0003-3259-4571/work/142249651

Schlagworte

Schlagwörter

  • Electrostatic staggered vertical comb drive, Flatness-based and sliding-mode control, Normal form and high-gain observer, Quasistatic microscanner, Real-time closed-loop control