Nano-patterned PZT films for perspective fucntional materials

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

In this work, we describe the fabrication of PZT nanodisc arrays isolated by a polymer layer and contacted with a top electrode. PZT thin films were deposited by multi-target sputtering onto a platinum/titanium bottom electrode and structured by means of nanosphere lithography. To guarantee short-circuit-free evaporation of a top electrode, the space between the nanostructures was filled by a polymer. Two approaches for the filling are demonstrated: (i) imprinting and (ii) skim coating. Single nanodiscs embedded in a flexible polymer matrix have two major advantages. First, taking into account the flexibility of the matrix they can vibrate freely in lateral direction and, second, due to shrinking to the nanoscale, predominant directions of the polarization form, such as vortex-or bubble-like domain patterns. Piezoresponse force microscopy was performed on patterned and non-patterned samples with and without a top electrode to check the local piezoresponse. Comparison of both samples revealed an increase in lateral piezoactivity for patterned samples while the out-of-plane piezoresponse remained constant.

Details

OriginalspracheEnglisch
TitelProc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012
PublikationsstatusVeröffentlicht - 2012
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
ISSN1099-4734

Konferenz

Titel2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM
Dauer9 - 13 Juli 2012
StadtAveiro
LandPortugal

Externe IDs

ORCID /0000-0002-2484-4158/work/175744080
ORCID /0000-0002-7062-9598/work/175744661

Schlagworte

ASJC Scopus Sachgebiete

Schlagwörter

  • functional material, nanosphere lithograpghy, nanostructures, piezoresponse force microscopy, PZT