Enhanced piezoelectric response in nano-patterned lead zirconate titanate thin films
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
In this work, Pb(Zr,Ti)O3 thin films were used to fabricate well-ordered nanodot arrays by means of nanosphere lithography. This technique is based on a two-step etch process that enables excellent control of the fabrication of ordered nanodisc arrays of defined height, diameter, and pitch. Piezoresponse force microscopy was used to investigate both non-patterned and patterned films. The topography and both the out-of-plane and the in-plane polarization were deduced in this mode. Grains of nanodots with a low aspect ratio form domain structures comparable to domains in non-patterned two-dimensional films. In contrast, nanodots with a higher aspect ratio form particular structures like bi-sectioned domain assemblies, c-shaped domains or multi-domains surrounding a center domain. The patterning of the ferroelectric material was shown to affect the formation of ferroelectric domains. The initial polycrystalline films with random polarization orientation re-orient upon patterning and then show domain structures dependent on the nanodisc diameter and aspect ratio. # 2012 The Japan Society of Applied Physics.
Details
Originalsprache | Englisch |
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Aufsatznummer | 11PG04 |
Fachzeitschrift | Japanese journal of applied physics |
Jahrgang | 51 |
Ausgabenummer | 11 PART2 |
Publikationsstatus | Veröffentlicht - Nov. 2012 |
Peer-Review-Status | Ja |
Externe IDs
ORCID | /0000-0002-2484-4158/work/158768094 |
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ORCID | /0000-0002-7062-9598/work/173051239 |