Electric field-induced crystallization of ferroelectric hafnium zirconium oxide
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Ferroelectricity in crystalline hafnium oxide thin films is strongly investigated for the application in non-volatile memories, sensors and other applications. Especially for back-end-of-line (BEoL) integration the decrease of crystallization temperature is of major importance. However, an alternative method for inducing ferroelectricity in amorphous or semi-crystalline hafnium zirconium oxide films is presented here, using the newly discovered effect of electric field-induced crystallization in hafnium oxide films. When applying this method, an outstanding remanent polarization value of 2PR = 47 μ C/cm2 is achieved for a 5 nm thin film. Besides the influence of Zr content on the film crystallinity, the reliability of films crystallized with this effect is explored, highlighting the controlled crystallization, excellent endurance and long-term retention.
Details
Originalsprache | Englisch |
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Aufsatznummer | 22266 |
Fachzeitschrift | Scientific reports |
Jahrgang | 11 |
Ausgabenummer | 1 |
Publikationsstatus | Veröffentlicht - Dez. 2021 |
Peer-Review-Status | Ja |
Externe IDs
PubMed | 34782687 |
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ORCID | /0000-0002-2484-4158/work/142257574 |