A Study on Imprint Behavior of Ferroelectric Hafnium Oxide Caused by High-Temperature Annealing
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Hafnium oxide is found to be a favorable material for ferroelectric nonvolatile memory devices. Its compatibility with complementary metal–oxide–semiconductor processes, the relatively low crystallization temperature when zirconium-doped, and the thickness scaling are among the advantageous properties of hafnium oxide. Different requirements must be fulfilled for different applications of hafnium oxide. Herein, high-temperature annealing and operation conditions are analyzed in order to investigate nonvolatile memories for automotive applications. A strong imprint behavior (shift in coercive voltages) is observed after annealing hafnium–zirconium–oxide thin films at temperatures varied between 100 and 200 °C. The imprint behavior is a significant challenge in many applications. Therefore, to reduce/recover the undesirable imprint behavior caused by high-temperature treatment, two different ways are successfully examined and delineated here: endurance cycling and applying high electric fields.
Details
Originalsprache | Englisch |
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Aufsatznummer | 2300067 |
Seitenumfang | 7 |
Fachzeitschrift | Physica Status Solidi (A) Applications and Materials Science |
Jahrgang | 220 |
Ausgabenummer | 7 |
Publikationsstatus | Veröffentlicht - 7 Feb. 2023 |
Peer-Review-Status | Ja |
Externe IDs
Scopus | 85149586152 |
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ORCID | /0000-0002-2484-4158/work/150330976 |
Schlagworte
Forschungsprofillinien der TU Dresden
Schlagwörter
- ferroelectric, hafnium zirconium oxide, high-temperature reliability, imprint, memory