Water-based, large-scale transfer of 2D materials grown on sapphire substrates

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Nico Rademacher - , AMO GmbH, RWTH Aachen University (Author)
  • Lukas Völkel - , RWTH Aachen University (Author)
  • Eros Reato - , RWTH Aachen University (Author)
  • Martin Otto - , AMO GmbH (Author)
  • Simonas Krotkus - , Aixtron SE (Author)
  • Jan Mischke - , Aixtron SE (Author)
  • Emre Yengel - , Aixtron SE (Author)
  • Christof Mauder - , Aixtron SE (Author)
  • Alex Henning - , Aixtron SE (Author)
  • Michael Heuken - , Aixtron SE (Author)
  • Ke Ran - , AMO GmbH, RWTH Aachen University (Author)
  • Joachim Mayer - , RWTH Aachen University (Author)
  • Max C. Lemme - , AMO GmbH, RWTH Aachen University (Author)
  • Transregio 404: Next Generation Electronics With Active Devices in Three Dimensions

Abstract

Two-dimensional materials (2DMs) hold significant potential for future electronics, as demonstrated by high-performing devices for sensing, optics, and electronics. However, scalable growth techniques such as metal-organic chemical vapor deposition (MOCVD) typically require high temperatures, which limit their integration with conventional semiconductor processes. Therefore, reliable transfer processes from crystalline, low-contamination growth substrates such as sapphire are essential. Existing methods using chemicals such as potassium hydroxide (KOH) have potential quality issues and require manual handling and enhanced safety precautions. Here, we introduce a deionized water-based, frame-assisted, large-scale transfer method for two widely used two-dimensional materials, molybdenum disulfide (MoS2) and hexagonal boron nitride (h-BN). We demonstrate the scalability of our process with the transfer of MoS2 from a 100 mm diameter sapphire wafer. The material quality was verified as-grown and after transfer via atomic force microscopy, scanning electron microscopy, and Raman spectroscopy. The data show less compressive strain levels and insignificant changes in the doping or contamination of 2DMs after transfer.

Details

Original languageEnglish
Article number48
Journalnpj 2D materials and applications
Volume10
Issue number1
Publication statusPublished - Dec 2026
Peer-reviewedYes
Externally publishedYes