Fabrication of two- and three-dimensional structures in the micro- and nano-range allows a new degree of freedom for the design of materials by tailoring desired material properties and, thus, obtaining enhanced functionalities. Such complex designs are only possible using novel fabrication techniques with high resolution, even in the nanoscale range. Additionally, the implementation of methods capable to produce the mentioned structures into industrial applications requires the ability to process large areas at high throughputs. An innovative solution for high-speed surface patterning of periodic structures is laser-based interferometric methods, such as laser interference lithography (LIL) and Direct Laser Interference Patterning (DLIP). Here, periodic structures can be produced in different materials by overlapping a certain number of laser beams over the material’s surface. These methods are introduced in this chapter, showing different processing systems and configurations, demonstrating the possibility for the fast and precise tailoring of material surface microstructures and topographies on industrial relevant scales. Finally, several application examples are described.