Thickness-Driven Modulation of Electronic Transport in SnSe2-grown Films by Low-Temperature Atomic Layer Deposition

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Alejandra Ruiz-Clavijo - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Amin Bahrami - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Jaroslav Charvot - , University of Pardubice (Author)
  • Sebastian Lehmann - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Jaakko Julin - , University of Jyväskylä (Author)
  • Daniel Wolf - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Lars Giebeler - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Angelika Wrzesińska-Lashkova - , Chair of Emerging Electronic Technologies (gB/IFW and cfaed), Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Fabian Pieck - , Leipzig University (Author)
  • Javier Outon - , University of Cádiz (Author)
  • Ralf Tonner-Zech - , Leipzig University (Author)
  • Filip Bureš - , University of Pardubice (Author)
  • Yana Vaynzof - , Center for Advancing Electronics Dresden (cfaed), Chair of Emerging Electronic Technologies (gB/IFW and cfaed), Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Eduardo Blanco - , University of Cádiz (Author)
  • Kornelius Nielsch - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)

Abstract

Low-temperature atomic layer deposition (ALD) is increasingly important for the integration of layered metal dichalcogenides such as tin diselenide (SnSe2) into advanced nanoelectronic devices, where compatibility with temperature-sensitive substrates and precise thickness control are essential. Using a novel and highly reactive selenium precursor, namely, bis(trimethylstannyl)selenide or Se(SnMe3)2, SnSe2 films are deposited at reduced temperatures. As-deposited films are initially amorphous, however, post-deposition annealing at 250°C induces crystallization. Structural analysis reveals a clear evolution in crystallinity: ultrathin films (∼25 nm) exhibit nearly single-crystalline, defect-free domains, while thicker films (∼100 nm) transition to a polycrystalline structure. This controlled variation in crystal quality directly influences the electronic transport properties, demonstrating the potential of low-temperature ALD combined with mild annealing for scalable fabrication of high-performance, thickness-engineered SnSe2-based devices.

Details

Original languageEnglish
Article numbere00560
JournalAdvanced electronic materials
Volume12
Issue number2
Early online date17 Dec 2025
Publication statusPublished - 21 Jan 2026
Peer-reviewedYes

Keywords

Keywords

  • 2D materials, low temperature ALD, SnSe, thin film, transport properties