THERMAL RELAXATION PHENOMENA IN THE FORMATION OF DEVICE-QUALITY SIO2/SI INTERFACES

Research output: Other contribution › Other › Contributed

Contributors

  • G LUCOVSKY - (Author)
  • CH BJORKMAN - (Author)
  • T YASUDA - (Author)
  • U EMMERICHS - (Author)
  • C MEYER - (Author)
  • H Kurz - (Author)
  • Karl Leo - , Chair of Opto-Electronics (Author)

Details

Original languageEnglish
Number of pages4
Volume32
Publication statusPublished - 1993
Peer-reviewedNo
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