Temperature-dependent transport mechanisms through PE-CVD coatings: Comparison of oxygen and water vapour

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • D. Kirchheim - , RWTH Aachen University (Author)
  • S. Wilski - , RWTH Aachen University (Author)
  • M. Jaritz - , RWTH Aachen University (Author)
  • F. Mitschker - , Ruhr University Bochum (Author)
  • M. Gebhard - , Ruhr University Bochum (Author)
  • M. Brochhagen - , Ruhr University Bochum (Author)
  • M. Böke - , Ruhr University Bochum (Author)
  • Jan Benedikt - , Ruhr University Bochum (Author)
  • P. Awakowicz - , Ruhr University Bochum (Author)
  • A. Devi - , Ruhr University Bochum (Author)
  • Ch Hopmann - , RWTH Aachen University (Author)
  • R. Dahlmann - , RWTH Aachen University (Author)

Abstract

When it comes to thin coatings such as plasma-enhanced chemical vapour deposition or plasma-enhanced atomic layer deposition coatings on substrates of polymeric material, existing models often describe transport through these thin coatings as mainly driven by transport through defects of different sizes. However, temperature-dependent measurements of permeation could not confirm this hypothesis and instead gaseous transport through these thin coatings was found to more likely to occur through the molecular structure. This paper correlates existing transport models with data from oxygen transmission experiments and puts recent investigations for water vapour transmission mechanisms into context for a better understanding of gaseous transport through thin coatings.

Details

Original languageEnglish
Article number395302
JournalJournal of Physics D: Applied Physics
Volume50
Issue number39
Publication statusPublished - 4 Sept 2017
Peer-reviewedYes
Externally publishedYes

Keywords

Keywords

  • barrier coatings, gaseous transport, oxygen, PE-CVD, permeation, thin coatings, transport model