Shortening of Cycle Time in Semiconductor Manufacturing via Meaningful Lot Sizes

Research output: Contribution to book/Conference proceedings/Anthology/Report › Chapter in book/Anthology/Report › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publication26th Annual IEEE/SEMI® Advanced Semiconductor Manufacturing Conference – ASMC
Publication statusPublished - 2015
Peer-reviewedYes

External IDs

ORCID /0000-0001-6942-3763/work/142252836

Keywords

Keywords

  • Shortening of Cycle time, Semiconductor Manufactoring