Scalable Disordered Hyperuniform Architectures via Nanoimprint Lithography of Metal Oxides

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

Fabrication and scaling of disordered hyperuniform materials remain hampered by the difficulties in controlling the spontaneous phenomena leading to this novel kind of exotic arrangement of objects. Here, we demonstrate a hybrid top-down/ bottom-up approach based on sol-gel dip-coating and nanoimprint lithography for the faithful reproduction of disordered hyperuniform metasurfaces in metal oxides. Nano- to microstructures made of silica and titania can be directly printed over several cm(2) on glass and on silicon substrates. First, we describe the polymer mold fabrication starting from a hard master obtained via spontaneous solid-state dewetting of SiGe and Ge thin layers on SiO2. Then, we assess the effective disordered hyperuniform character of master and replica and the role of the thickness of the solgel layer on the metal oxide replicas and on the presence of a residual layer underneath. Finally, as a potential application, we show the antireflective character of titania structures on silicon. Our results are relevant for the realistic implementation over large scales of disordered hyperuniform nano- and microarchitectures made of metal oxides, thus opening their exploitation in the framework of wet chemical assembly.

Details

Original languageEnglish
Pages (from-to)37761-37774
Number of pages14
JournalACS applied materials & interfaces
Volume13
Issue number31
Publication statusPublished - 11 Aug 2021
Peer-reviewedYes

External IDs

Scopus 85112501201

Keywords

Keywords

  • Coatings, Porosity, Surface, Thin film, disordered hyperuniformity, nanoimprint lithography, silica, sol-gel dip-coating, titania