The Safety Function-FMEA (SF-FMEA) is an established process in the automotive industry, while mobile machines are produced as special-purpose vehicles in small series for on- and off-road applications. On-road vehicles comply with ISO 26262 for functional safety, while off-road machines follow ISO 13849. Safety architectures (CAT 2, 3 & 4) in mobile machinery often require more process-related data, which complicates their integration into traditional FMEA structures. This paper presents methods to include critical safety architectures, identify relevant process data, and integrate solutions into FMEA structures and software tools. The focus is on evaluating failure modes and embedding SF-FMEA results into machine simulation models to validate safety system behaviour before the first machine prototypes are built. The new SF-FMEA process and software tool guide developers intuitively and support automatic verification and documentation of results in FMEDA (Failure Mode Effects and Diagnostic Analyses). It includes calculation tools for safety-relevant parameters such as the Probability of dangerous Failure per Hour (PFH_D), Mean Time to dangerous Failure (MTTF_D), Diagnostic Coverage (DC), and Performance Levels (PLs), enhancing failure mode evaluation. Since machine-specific PLs are not defined in current standards, the method efficiently compares the actual achievement with the required Performance Level (PLr). The effectiveness of the new SF-FMEA process and the software tool is demonstrated through the validation of an excavator safety system using FMEA, FMEDA, and simulation results.