Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Collaborators - (Author)
  • Anjana Devi - , Ruhr University Bochum (Author)
  • Aalto University
  • Stanford Engineering
  • University of Montpellier
  • University of Twente
  • Bulgarian Academy of Sciences
  • Masaryk University
  • Huazhong University of Science and Technology
  • SIMAP
  • Ghent University
  • St. Petersburg State University
  • Alikhanov Institute for Theoretical and Experimental Physics
  • Fondazione Bruno Kessler
  • VTT Technical Research Centre of Finland Ltd.
  • Lam Research Corporation
  • Seoul National University
  • Global Foundries, Inc.
  • Åbo Akademi University
  • St. Petersburg State Electrotechnical University
  • Massachusetts Institute of Technology (MIT)
  • TechInsights
  • RAS - Ioffe Physico Technical Institute
  • SENTECH Instruments GmbH
  • NovaldMedical Ltd Oy
  • University of Helsinki
  • STMicroelectronics
  • Seagate Technology
  • St. Petersburg State Institute of Technology
  • Renewable Energy Development Center
  • Chemnitz University of Technology
  • Summa Semiconductor Oy
  • Military University of Technology Warsaw
  • ASELSAN Inc.
  • Linköping University
  • KOBUS
  • Tallinn University of Technology
  • Eindhoven University of Technology
  • Netherlands Organisation for Applied Scientific Research

Abstract

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and developed independently, at least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating back to 1974 in Finland, has been commonly known as the origin of ALD, while work done since the 1960s in the Soviet Union under the name "molecular layering" (and sometimes other names) has remained much less known. The virtual project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of ALD more transparent. In VPHA, started in July 2013, the target is to list, read and comment on all early ALD academic and patent literature up to 1986. VPHA has resulted in two essays and several presentations at international conferences. This paper, based on a poster presentation at the 16th International Conference on Atomic Layer Deposition in Dublin, Ireland, 2016, presents a recommended reading list of early ALD publications, created collectively by the VPHA participants through voting. The list contains 22 publications from Finland, Japan, Soviet Union, United Kingdom, and United States. Up to now, a balanced overview regarding the early history of ALD has been missing; the current list is an attempt to remedy this deficiency.

Details

Original languageEnglish
Article number010801
Pages (from-to)1-13
Number of pages14
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume35
Issue number1
Publication statusE-pub ahead of print - 16 Dec 2016
Peer-reviewedYes
Externally publishedYes