RESURF n-LDMOS Transistor for Advanced Integrated Circuits in 4H-SiC
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
The electrical behavior of lateral 4H-SiC n-laterally-diffused metal-oxide semiconductor (LDMOS) transistors with reduced surface field (RESURF) for integrated circuits was designed, measured, and modeled using different design variations. An additional implanted n-layer forming the drift region of the device in a p-doped epitaxy promotes a RESURF and thereby enhances the breakdown capability. The design rules of the presented power MOSFET are compatible to an existing technology for a novel 20-V 4H-SiC CMOS process. The dose of the additionally implanted RESURF region with a depth of approximately 390 nm was 3.5·1012 cm-2. Breakdown voltages in the range of 372-981 V and ON-state resistances from 1000 down to 54 mQ cm2 were measured, depending on the design variations. The best measured figure-of-merit (FOM, V2BD/RON) value results in 12.3 MW/cm2. Additionally, the electrical behavior of the presented n-LDMOS transistor was compared to a TCAD simulation model. Hereby, design guidelines concerningthe length of the channel, drift region, and field plate were derived, which will be helpful for further investigations. Moreover, according to the simulations, a deeper RESURF region of 1 μm and a higher RESURF dose of 6·1012 cm-2 would even result in FOM values above 43 MW/cm2.
Details
| Original language | German |
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| Article number | 9132665 |
| Pages (from-to) | 3278-3284 |
| Number of pages | 7 |
| Journal | IEEE transactions on electron devices : ED |
| Volume | 67 |
| Issue number | 8 |
| Publication status | Published - 1 Aug 2020 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85089338127 |
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Keywords
Keywords
- Transistors, Electric breakdown, Silicon carbide, Integrated circuit modeling, Voltage measurement, Mathematical model