The functionalities of service robots are steadily extended allowing them to fulfill more and more sophisticated tasks (e. g. in the fields of maintenance, security, health care, entertainment and personal assistance). Therefore novel 3D measuring systems are required to achieve real-time 3D data. This article is related to the novel adaptive 3D sensor system TACO with real 3D foveation properties, endowing service robots with a higher level of real time perception of demands and interaction capabilities with respect to everyday objects and environments. The adaptive sensor properties are realized by a novel micro scanning mirror with quasi-static resonant actuation, which is the focus of this article.