Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Thilo Sandner - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thomas Grasshoff - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Markus Schwarzenberg - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Richard Schroedter - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Harald Schenk - , Fraunhofer Institute for Electronic Nano Systems (Author)

Details

Original languageEnglish
Number of pages10
JournalProceedings of SPIE
Volume8977
Publication statusPublished - 2014
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 84900817527
ORCID /0000-0003-3259-4571/work/142249656

Keywords

Keywords

  • Optical MEMS, linearized raster scanning, vertical comb drive, LIDAR, 3D sensing, ToF time-of-flight distance measurement