Polymer hybrid material for use in a splitting method

Research output: Intellectual property › Patent application/Patent

Contributors

  • Christian Beyer - (Inventor)
  • Jan Richter - (Inventor)
  • Marko Swoboda - , Infineon Technologies AG (Inventor)
  • Siltectra GmbH

Abstract

A polymer hybrid material, a film comprising the polymer hybrid material, the use of the polymer hybrid material, a splitting method using the polymer hybrid material, and a method for producing the polymer hybrid material are provided for increasing the total yield, i.e. the efficiency with respect to the raw materials used and other resources such as energy and workforce, of a splitting method. The polymer hybrid material for use in a splitting method has at least two solid-body sections produced from a solid-body starting material. The polymer hybrid material comprises a polymer matrix and a first filler and a second filler embedded into the polymer matrix.

Details

A polymer hybrid material, a film comprising the polymer hybrid material, the use of the polymer hybrid material, a splitting method using the polymer hybrid material, and a method for producing the polymer hybrid material are provided for increasing the total yield, i.e. the efficiency with respect to the raw materials used and other resources such as energy and workforce, of a splitting method. The polymer hybrid material for use in a splitting method has at least two solid-body sections produced from a solid-body starting material. The polymer hybrid material comprises a polymer matrix and a first filler and a second filler embedded into the polymer matrix.

Original languageEnglish
IPC (International Patent Classification)H01L 21/ 304 A I
Patent numberUS2019071552
Filing date23 Mar 2017
Country/TerritoryUnited States of America
Priority date23 Mar 2017
Priority numberWO2017EP56945
Publication statusPublished - 7 Mar 2019
Externally publishedYes
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External IDs

ORCID /0000-0003-2572-1149/work/208796511