Pilot SQUID Evaluation of a MEMS Cantilever Resonator With Monolithic PowderMEMS Magnets Used as a Miniaturized Oscillatory B-Field Marker

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Johan Arbustini - , Kiel University (Author)
  • Eric Elzenheimer - , Kiel University, National Metrology Institute of Germany (PTB) (Author)
  • Silvia Knappe-Gruneberg - , National Metrology Institute of Germany (PTB) (Author)
  • Bjorn Gojdka - , Fraunhofer Institute for Silicon Technology (Author)
  • Michael Hoft - , Kiel University (Author)
  • Robert Rieger - , Kiel University (Author)
  • Andreas Bahr - , Chair of Biomedical Electronics (Author)

Abstract

This letter presents a pilot evaluation of a microelectromechanical-system (MEMS) cantilever resonator with monolithically integrated NdFeB magnets at its tip for compact generation of a time-dependent magnetic field. By applying a low-amplitude sinusoidal voltage with a predefined frequency to a piezoelectric layer, the cantilever is driven at its mechanical resonance, causing the embedded magnets to oscillate in space, resulting in a time-varying magnetic flux density. A prototype device is characterized for the first time by a superconducting quantum interference device magnetometer inside a magnetically shielded room only for evaluation purposes. A magnetic performance factor is introduced, which relates device design aspects to experimental observables and allows for the comparison of different devices. The results enable us to outline optimization steps toward robust, low-power MEMS-based magnetic field markers for biomagnetic sensing applications, industrial sensing, and magnetic measurement platforms where conventional coil-based systems are impractical.

Details

Original languageEnglish
Article number2505704
Number of pages4
JournalIEEE Sensors Letters
Volume9
Issue number12
Publication statusPublished - Dec 2025
Peer-reviewedYes

External IDs

ORCID /0000-0001-8012-6794/work/197966040
WOS 001616260300001

Keywords

Keywords

  • magnetic field generators, magnetic performance factor (MPF), Magnetic sensors, magnetoelectric (ME) sensors, magnetometers, powder magnets