SiO ₂ surface with patterned Au films was demonstrated to act as an effective template for an organic semiconductor α-6T used in field-effect transistors (FET) applications. The results show that on Au, α-6T forms three-dimensional crystals of smaller size, while on SiO ₂, flat and large two-dimensional crystals are formed. It is also observed that continuous Au films and 3-D crystals on top of the Au films are selectively removed, leaving behind patterned 2-D crystals on the substrate. Patterned α-6T crystals with square, rectangular, and star shapes can also be grown with yield higher than 80%. Atomic force microscopy (AFM) studies show that the obtained crystals are composed of various layers, with the thicknesses of each layer being 2.3 nm, corresponding to a single layer of α-6T molecules.