New design approach of vertical inductors for high-frequency integrated circuits

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Abstract

This paper presents a new method for the design of inductors in high-frequency integrated circuits. In order to increase the inductance per unit of area more than one metal layer is used and the spiral inductor is oriented in the vertical instead of the horizontal plane. The inductor is designed in 130 nm BiCMOS technology using five metal layers. Simulations were performed via Sonnet 3D EM software. The inductance at low frequencies was verified with the Greenhouse method using Grover formulas. Good agreement between simulations and analytical calculations was found when the inductance length and metal width was changed. As a first proof of concept, an inductor of 340 pH with self-resonance frequency of 51.7 GHz and a quality factor of 3.14 at 26 GHz was designed, which is well suited for peaking purposes. The designed inductor shows an inductance per unit of area of 377 nH/mm2. This is a significant improvement compared to planar inductors.

Details

Original languageEnglish
Title of host publication2013 SBMO/IEEE MTT-S International Microwave & Optoelectronics Conference (IMOC)
Place of PublicationRio de Janeiro
PublisherIEEE
ISBN (electronic)978-1-4799-1397-8
Publication statusPublished - 2013
Peer-reviewedYes

Publication series

SeriesSBMO/IEEE MTT-S International Conference on Microwave and Optoelectronics (IMOC)

Conference

Title2013 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference
Abbreviated titleIMOC 2013
Conference number15
Duration4 - 7 August 2013
LocationPontifícia Universidade Católica do Rio de Janeiro
CityRio de Janeiro
CountryBrazil

External IDs

Scopus 84887415027
ORCID /0000-0002-1851-6828/work/142256735

Keywords

Research priority areas of TU Dresden

Keywords

  • Vertical Inductors