Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Mindaugas Andrulevičius - , Kaunas University of Technology (Author)
  • Evgenii Artiukh - , TUD Dresden University of Technology (Author)
  • Gunnar Suchaneck - , Chair of Solid State Electronics (Author)
  • Sitao Wang - , Chair of Solid State Electronics (Author)
  • Nikolai A. Sobolev - , University of Aveiro (Author)
  • Gerald Gerlach - , Chair of Solid State Electronics (Author)
  • Asta Tamulevičienė - , Kaunas University of Technology (Author)
  • Brigita Abakevičienė - , Kaunas University of Technology (Author)
  • Sigitas Tamulevičius - , Kaunas University of Technology (Author)

Abstract

X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were co-sputtered in an argon–oxygen gas mixture. The chamber was provided with an oxygen background flow plus an additional controlled oxygen supply to each of the targets. We demonstrate that variation in the power applied to the Mo target during MT-RMS enables the production of strontium and molybdenum oxide films with variable concentrations of Mo atoms. Both molybdenum and strontium were found in the oxidized state, and no metallic peaks were detected. The deconvoluted high-resolution XPS spectra of molybdenum revealed the presence of several Mo 3d peaks, which indicates molybdenum bonds in a lower valence state. Contrary to the Mo spectra, the high-resolution strontium Sr 3d spectra for the same samples were very similar, and no additional peaks were detected.

Details

Original languageEnglish
Article number2175
Number of pages10
JournalMaterials
Volume16 (2023)
Issue number6
Publication statusPublished - 8 Mar 2023
Peer-reviewedYes

External IDs

ORCID /0000-0002-7062-9598/work/174430559

Keywords

Keywords

  • multitarget reactive magnetron sputtering, strontium molybdate, X-ray photoelectron spectroscopy