Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were co-sputtered in an argon–oxygen gas mixture. The chamber was provided with an oxygen background flow plus an additional controlled oxygen supply to each of the targets. We demonstrate that variation in the power applied to the Mo target during MT-RMS enables the production of strontium and molybdenum oxide films with variable concentrations of Mo atoms. Both molybdenum and strontium were found in the oxidized state, and no metallic peaks were detected. The deconvoluted high-resolution XPS spectra of molybdenum revealed the presence of several Mo 3d peaks, which indicates molybdenum bonds in a lower valence state. Contrary to the Mo spectra, the high-resolution strontium Sr 3d spectra for the same samples were very similar, and no additional peaks were detected.
Details
| Original language | English |
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| Article number | 2175 |
| Number of pages | 10 |
| Journal | Materials |
| Volume | 16 (2023) |
| Issue number | 6 |
| Publication status | Published - 8 Mar 2023 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0002-7062-9598/work/174430559 |
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Keywords
ASJC Scopus subject areas
Keywords
- multitarget reactive magnetron sputtering, strontium molybdate, X-ray photoelectron spectroscopy