Multi Fourier Horn Ultrasonic Nebulizer Based on Laser Structuring of Silicon

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • Wail Al-Mogahed - , Chemnitz University of Technology (Author)
  • Sebastian Voigt - , Chemnitz University of Technology (Author)
  • Philipp J. Mehner - , Chemnitz University of Technology (Author)
  • Georgi Paschew - , Chair of Microsystems (Author)
  • Andreas Richter - , Chair of Microsystems (Author)
  • Jan Mehner - , Chemnitz University of Technology (Author)

Abstract

Silicon (Si)-based, multiple Fourier-horn ultrasonic nebulizer (MFHUN) was fabricated through femtosecond laser cutting of Si to reduce the preparation time of samples and to study the effectiveness of this manufacturing process for producing Si-resonating nebulizers. The geometrical characterization of the structures showed tolerances in the dimensions. These tolerances affected the efficient positioning of the liquid at the tip of the horn. Furthermore, the effect of the dimensional variations on the mechanical functionality increased with minimizing the size of the resonator. By managing the flow rate of the liquid fed to the nebulizer and adjusting the frequency of the structure when in contact with the liquid, atomization occurs.

Details

Original languageEnglish
Title of host publication2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-5
ISBN (electronic)979-8-3503-7826-9
Publication statusPublished - 2024
Peer-reviewedYes

Publication series

SeriesDesign, Test, Integration and Packaging of MEMS/MOEMS

Conference

Title2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2024
Duration2 - 5 June 2024
CityDresden
CountryGermany

External IDs

ORCID /0000-0002-8588-9755/work/167216994
ORCID /0000-0002-8001-2356/work/167217085

Keywords

Keywords

  • Fourier horn ultrasonic nebulizer, liquid flow rate, Piezoelectric transducer, resonance frequency, silicon laser structuring