Multi Fourier Horn Ultrasonic Nebulizer Based on Laser Structuring of Silicon
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Silicon (Si)-based, multiple Fourier-horn ultrasonic nebulizer (MFHUN) was fabricated through femtosecond laser cutting of Si to reduce the preparation time of samples and to study the effectiveness of this manufacturing process for producing Si-resonating nebulizers. The geometrical characterization of the structures showed tolerances in the dimensions. These tolerances affected the efficient positioning of the liquid at the tip of the horn. Furthermore, the effect of the dimensional variations on the mechanical functionality increased with minimizing the size of the resonator. By managing the flow rate of the liquid fed to the nebulizer and adjusting the frequency of the structure when in contact with the liquid, atomization occurs.
Details
Original language | English |
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Title of host publication | 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2024 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1-5 |
ISBN (electronic) | 979-8-3503-7826-9 |
Publication status | Published - 2024 |
Peer-reviewed | Yes |
Publication series
Series | Design, Test, Integration and Packaging of MEMS/MOEMS |
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Conference
Title | 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2024 |
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Duration | 2 - 5 June 2024 |
City | Dresden |
Country | Germany |
External IDs
ORCID | /0000-0002-8588-9755/work/167216994 |
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ORCID | /0000-0002-8001-2356/work/167217085 |
Keywords
ASJC Scopus subject areas
Keywords
- Fourier horn ultrasonic nebulizer, liquid flow rate, Piezoelectric transducer, resonance frequency, silicon laser structuring