Method for forming a crack in an edge region of a donor substrate

Research output: Intellectual propertyPatent application/Patent

Contributors

  • Marko David Swoboda - , Infineon Technologies AG (Inventor)
  • Christian Beyer - (Inventor)
  • Franz Schilling - (Inventor)
  • Jan Richter - (Inventor)
  • Siltectra GmbH

Abstract

A method for separating a solid-body layer from a donor substrate includes: providing a donor substrate having a planar surface, a longitudinal axis orthogonal to the planar surface, and a peripheral surface; producing a plurality of modifications within the donor substrate using at least one LASER beam, wherein the at least one LASER beam penetrates the donor substrate via the peripheral surface at an angle not equal to 90° relative to the longitudinal axis of the donor substrate; producing a stress-inducing polymer layer on the planar surface of the donor substrate; and producing mechanical stresses in the donor substrate by a thermal treatment of the stress-inducing polymer layer, wherein the mechanical stresses produce a crack for separating the solid-body layer, and wherein the crack propagates along the modifications.

Details

A method for separating a solid-body layer from a donor substrate includes: providing a donor substrate having a planar surface, a longitudinal axis orthogonal to the planar surface, and a peripheral surface; producing a plurality of modifications within the donor substrate using at least one LASER beam, wherein the at least one LASER beam penetrates the donor substrate via the peripheral surface at an angle not equal to 90° relative to the longitudinal axis of the donor substrate; producing a stress-inducing polymer layer on the planar surface of the donor substrate; and producing mechanical stresses in the donor substrate by a thermal treatment of the stress-inducing polymer layer, wherein the mechanical stresses produce a crack for separating the solid-body layer, and wherein the crack propagates along the modifications.

Original languageEnglish
IPC (International Patent Classification)H01L 31/ 18 A I
Patent numberUS2021213643
Filing date26 Mar 2021
Country/TerritoryUnited States of America
Priority date26 Mar 2021
Priority numberUS202117214256
Publication statusPublished - 15 Jul 2021
Externally publishedYes
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External IDs

ORCID /0000-0003-2572-1149/work/208796503