Low Temperature Atomic Layer Deposition of (00l)-Oriented Elemental Bismuth

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Jorge Luis Vazquez-Arce - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Alessio Amoroso - , Leibniz Institute for Solid State and Materials Research Dresden, Universita' di Napoli Federico II (Author)
  • Nicolas Perez - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Jaroslav Charvot - , University of Pardubice (Author)
  • Dominik Naglav-Hansen - , Ruhr University Bochum (Author)
  • Panpan Zhao - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Jun Yang - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Sebastian Lehmann - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Angelika Wrzesińska-Lashkova - , Chair of Emerging Electronic Technologies (gB/IFW and cfaed), Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Fabian Pieck - , Leipzig University (Author)
  • Ralf Tonner-Zech - , Leipzig University (Author)
  • Filip Bureš - , University of Pardubice (Author)
  • Annalisa Acquesta - , Universita' di Napoli Federico II (Author)
  • Yana Vaynzof - , Center for Advancing Electronics Dresden (cfaed), Chair of Emerging Electronic Technologies (gB/IFW and cfaed), Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Anjana Devi - , Leibniz Institute for Solid State and Materials Research Dresden, Ruhr University Bochum (Author)
  • Kornelius Nielsch - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Amin Bahrami - , Leibniz Institute for Solid State and Materials Research Dresden (Author)

Abstract

This study presents the first successful demonstration of growing elemental bismuth (Bi) thin films via thermal atomic layer deposition (ALD) using Bi(NMe2)3 as the precursor and Sb(SiMe3)3 as the co-reactant. The films were deposited at a relatively low temperature of 100 °C, with a growth per cycle (GPC) of 0.31–0.34 Å/cycle. Island formation marked the initial growth stages, with surface coverage reaching around 80 % after 1000 cycles and full coverage between 2000 and 2500 cycles. Morphological analysis revealed that the Bi grains expanded and became more defined as the number of ALD cycles increased. This coalescence is further supported by X-ray diffraction (XRD) patterns, which show a preferential shift in growth orientation from the (012) plane to the (003) plane as the film thickness increases. X-ray photoemission spectroscopy (XPS) confirmed the presence of metallic Bi with minimal surface oxidation. Temperature-dependent sheet resistance measurements highlight the semimetallic nature of Bi, with a room temperature resistivity of ≈200 μΩcm for the 2500 cycles Bi. Temperature-dependent sheet resistance was also associated with a transition in carrier-type dominance from holes at higher temperatures to electrones at lower temperatures.

Details

Original languageEnglish
Article numbere202422578
Number of pages13
JournalAngewandte Chemie - International Edition
Volume64
Issue number15
Early online dateJan 2025
Publication statusPublished - 7 Apr 2025
Peer-reviewedYes

External IDs

PubMed 39875330

Keywords

ASJC Scopus subject areas

Keywords

  • Atomic Layer Deposition, Hall resistance, Preferential growth, Surface Chemistry