Line-and hexagonal-like periodic textures were fabricated on aluminium zinc oxide (AZO) using direct laser interference patterning method. It was found that hexagonally patterned surfaces show a higher performance in both transparency and diffraction properties compared to line-like textured and non-patterned substrates. Furthermore, the electrical resistance of the processed AZO coated substrates remained below the tolerance values for transparent conducting electrodes. (C) 2013 The Authors. Published by Elsevier B. V. Selection and/or peer-review under responsibility of the German Scientific Laser Society (WLT e.V.)