Investigation of HOLZ rings in EBSD patterns

Research output: Contribution to journalResearch articleContributedpeer-review


  • E. Langer - , Chair of Microsystems, TUD Dresden University of Technology (Author)
  • S. Däbritz - , TUD Dresden University of Technology (Author)


Higher-Order Laue Zone (HOLZ) rings and their appearance in Electron Backscattered Diffraction (EBSD) pattern from molybdenum were fundamentally investigated in the Scanning Electron Microscope. HOLZ rings of the type 〈100〉, 〈110〉, 〈111〉, 〈113〉 and 〈133〉 could be unambiguous detected in EBSD pattern of different pure Mo crystals. The [100] HOLZ ring was observed more in detail in dependence on the accelerating energy in the pattern center, and the lattice spacing was determined for all energies. A relatively good accuracy could be obtained for Mo as model sample for problematical high atomic number materials.


Original languageEnglish
Pages (from-to)1867-1872
Number of pages6
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number6
Publication statusPublished - 2007


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