Investigation of a novel approach for the cross-linking characterization of SU-8 photoresist materials by means of optical dispersion measurements

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review

Contributors

Ch Taudt - , Faculty of Electrical and Computer Engineering, University of Applied Sciences Zwickau (Author)
T. Baselt - , University of Applied Sciences Zwickau (Author)
E. Koch - , Department of Anesthesiology and Intensive Care Medicine (Author)
P. Hartmann - , University of Applied Sciences Zwickau (Author)

Original language	English
Title of host publication	Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
Publication status	Published - 2014
Peer-reviewed	Yes

Scopus	84900502632